CVD Reactor

Technical Data

Reactor type: Plasma immersion
Microwave power: 5 kW
Microwave frequency: 2,45 GHz
Typical growth rate: up to 6 micrometers/h
Typical mass rate: 60 mg/h
Operation pressure: 10 to 100 Torr (1 to 100 Torr optional)
Sample size: 50 mm (2 inch)

Application

Formation of thin complex films and coatings based on carbon by MW CVD method. Typical growth rate: 2 - 5 or 6 microns/h