Two-beam ion implanter

Technical Data

Magnetic control: dM/M = 1/350, near 5 mA
Beam spot: up to 10x120 mm
Secondary ion beam: accelerated with 5-45 kV
Densities: near 500 mA/cm2


Creation of bioactive coatings layers. As coating layers the carbon based coatings and HAP are preferred; corrosion resistive coatings wear resistive coating based on carbon (e.g. DLC, SiC).