Ultra-high vacuum setup

Technical data:

Homemade, equipped in LEED/Auger spectrometer
vacuum: to 10-11 mbar
thermal evaporation: four vapour sources
evaporation rate: from 0 to 5 nm/min
thickness measurement accuracy: <10%

Applied to:

Thin film and multilayer fabrication.

SPECTROMETER LEED/AUGER

Technical data:

beam diameter: about 0,5 mm
electron energy:  
LEED range: to 700 eV
AES range: to 3000 eV

Applied to:

Surface chemical analysis, determination of surface crystallographic structure.

Department in which the equipment is in use:

Department of Materials Science