Two-Beam Ion Implanter

Technical Data

Main ion beam (most elements available)
Magnetic control: dM/M = 1/350, near 5mA
Beam spot: up to 10x120 mm
Secondary ion beam (all noble gases) accelerated with 5-45 kV
Densities: near 500 mA/cm2


Creation of bioactive coatings layers. As coating layers the carbon based coatings and HAP are preferred; corrosion resistive coatings wear resistive coating based on carbon (e.g. DLC, SiC)

Additional Informations

Department in which the equipment is in use

Department of Magnetic Materials and Nanostructures (NZ34)